Investigation of metal evaporation and film deposition with a high-voltage glow-discharge electron gun under middle vacuum

被引：0
|
作者：
Melnyk, IV [1 ]
Melnyk, VI [1 ]
Porytskyy, PV [1 ]
机构：
[1] Natl Tech Univ Ukraine, Kyiv Polytech Inst, Fac Elect, Elect Devices Dept, UA-03056 Kiev, Ukraine
来源：
ISDEIV: XXITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, VOLS 1 AND 2, PROCEEDINGS | 2004年 / 21卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The method of deposition of metals oxide and nitride coatings with using of glow discharge electron guns is discussed. Scheme of technological equipment to realising this process is represented and assignment of its major details is described. Technological parameters of elaborated equipment is pointed out. Mathematical model of realised technological process is proposed and obtained results of simulation is discussed and verified with experimental measurements.
引用
收藏
页码：575 / 578
页数：4
相关论文
共 50 条
  • [41] Theoretical Investigation of Energetic Efficiency of Impulse High Voltage Glow Discharge Electron Sources
    Denbnovetsky, S. V.
    Melnyk, I. V.
    Melnyk, V. G.
    Tugai, B. A.
    Tuhai, S. B.
    2016 IEEE 36TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO), 2016, : 365 - 369
  • [42] Wide-Aperture, Low-Energy Electron Accelerators Based on High-Voltage Glow Discharge
    Kosogorov, S. L.
    Uspenskii, N. A.
    Shvedyuk, V. Ya.
    Vaselenok, A. A.
    Dzhigailo, I. D.
    Smirnov, G. A.
    RUSSIAN PHYSICS JOURNAL, 2021, 63 (10) : 1686 - 1693
  • [43] Wide-Aperture, Low-Energy Electron Accelerators Based on High-Voltage Glow Discharge
    S. L. Kosogorov
    N. A. Uspenskii
    V. Ya. Shvedyuk
    A. A. Vaselenok
    I. D. Dzhigailo
    G. A. Smirnov
    Russian Physics Journal, 2021, 63 : 1686 - 1693
  • [44] COLD-CATHODE GLOW-DISCHARGE ELECTRON-GUN FOR HIGH-PRESSURE CO2-LASER IONIZATION
    ISAACS, GG
    JORDAN, DL
    DOOLEY, PJ
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1979, 12 (02): : 115 - 118
  • [45] Experimental investigation of the efficiency of a high-voltage glow discharge as a source of a beam of run-away electrons
    Voiteshonok, V. S.
    Golovin, A. I.
    Egorova, E. K.
    Lomakin, B. N.
    Turkin, A. V.
    Shloydo, A. I.
    HIGH TEMPERATURE, 2017, 55 (05) : 665 - 671
  • [46] Experimental investigation of the efficiency of a high-voltage glow discharge as a source of a beam of run-away electrons
    V. S. Voiteshonok
    A. I. Golovin
    E. K. Egorova
    B. N. Lomakin
    A. V. Turkin
    A. I. Shloydo
    High Temperature, 2017, 55 : 665 - 671
  • [47] INVESTIGATION BY TECHNIQUES OF ELECTRON STIMULATED DESORPTION OF MERITS OF GLOW-DISCHARGE CLEANING OF SURFACES OF VACUUM CHAMBERS AT CERN INTERSECTING STORAGE RINGS
    JONES, AW
    JONES, E
    WILLIAMS, EM
    VACUUM, 1973, 23 (07) : 227 - 230
  • [48] Cumulation effect of an electron beam generated in a high-voltage nanosecond discharge plasma in vacuum and gas diodes
    Lomaev, Mikhail I.
    Tarasenko, Victor F.
    Diatlov, Alexander V.
    Burachenko, Alexander G.
    XIV INTERNATIONAL CONFERENCE ON PULSED LASERS AND LASER APPLICATIONS, 2019, 11322
  • [49] Glow-discharge sputter deposition of Si films and fabrication of high-quality polycrystalline Si thin-film transistors
    Serikawa, T
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 48 : S35 - S39
  • [50] Investigation of Emission Properties of Cold Cathodes in Triode Impulse High Voltage Glow Discharge Electron Guns
    Denbnovetsky, S. V.
    Melnyk, I. V.
    Melnyk, V. G.
    Tugai, B. A.
    Tuhai, S. B.
    2015 IEEE 35TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO), 2015, : 465 - 468
12345