Investigation of metal evaporation and film deposition with a high-voltage glow-discharge electron gun under middle vacuum

被引：0
|
作者：
Melnyk, IV [1 ]
Melnyk, VI [1 ]
Porytskyy, PV [1 ]
机构：
[1] Natl Tech Univ Ukraine, Kyiv Polytech Inst, Fac Elect, Elect Devices Dept, UA-03056 Kiev, Ukraine
来源：
ISDEIV: XXITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, VOLS 1 AND 2, PROCEEDINGS | 2004年 / 21卷
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The method of deposition of metals oxide and nitride coatings with using of glow discharge electron guns is discussed. Scheme of technological equipment to realising this process is represented and assignment of its major details is described. Technological parameters of elaborated equipment is pointed out. Mathematical model of realised technological process is proposed and obtained results of simulation is discussed and verified with experimental measurements.
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页码：575 / 578
页数：4
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