Development and testing of manufacturable thin film TiNi for medical devices

被引：0

作者：

Jardine, A. Peter. ^{[1
]}

Baure, George ^{[1
]}

Le, An Nguyen ^{[1
]}

Carman, Gregory P. ^{[1
]}

机构：

[1] Shape Chang Technol, Thousand Oaks, CA USA

来源：

Medical Device Materials II: Proceedings from the Materials & Processes for Medical Devices Conference 2004 | 2005年

关键词：

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Thin film TiNi has been investigated by a variety of researchers over the past 10 years, however the key of a manufacturable process that can generate consistent yields over the wafer and from batch to batch is of importance. A sputtering technique that can generate consistent yields over the surface of a silicon wafer, as well as generating good batch-to-batch consistency, is now being investigated. After the initial thin film processing, fenestration techniques of the thin films, either in martensitic or super elastic states, has been developed. The mechanical properties of the thin film with be demonstrated to be dependent on both composition and processing. Finally, the use of solid thin films as actuators for pumps, such as for drug delivery systems, and as a stent covering, will be discussed.

引用

页码：112 / 115

页数：4

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