Development and testing of manufacturable thin film TiNi for medical devices

Thin film TiNi has been investigated by a variety of researchers over the past 10 years, however the key of a manufacturable process that can generate consistent yields over the wafer and from batch to batch is of importance. A sputtering technique that can generate consistent yields over the surface of a silicon wafer, as well as generating good batch-to-batch consistency, is now being investigated. After the initial thin film processing, fenestration techniques of the thin films, either in martensitic or super elastic states, has been developed. The mechanical properties of the thin film with be demonstrated to be dependent on both composition and processing. Finally, the use of solid thin films as actuators for pumps, such as for drug delivery systems, and as a stent covering, will be discussed.