Hybrid LTCC Temperature and Humidity Sensor

被引：0
|
作者：
Babiarz, Michal [1 ]
Jurkow, Dominik [1 ]
Czok, Mateusz [1 ]
Golonka, Leszek [1 ]
机构：
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50370 Wroclaw, Poland
来源：
MIXDES 2009: PROCEEDINGS OF THE 16TH INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS | 2009年
关键词：
LTCC; MCM-C; via; temperature; humidity sensor; x-ray inspection; FABRICATION; CERAMICS; LAYERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The Article presents the manufacturing of a ceramic/electronic multichip module able to measure, to process and to display temperature and humidity on a liquid crystal display (LCD). Presented device is battery fed. Moreover, the structure was analyzed by X-ray inspection. Via filler construction and an injection filling method is presented and described.
引用
收藏
页码：489 / 492
页数：4
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