Hybrid LTCC Temperature and Humidity Sensor

被引：0
|
作者：
Babiarz, Michal [1 ]
Jurkow, Dominik [1 ]
Czok, Mateusz [1 ]
Golonka, Leszek [1 ]
机构：
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50370 Wroclaw, Poland
来源：
MIXDES 2009: PROCEEDINGS OF THE 16TH INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS | 2009年
关键词：
LTCC; MCM-C; via; temperature; humidity sensor; x-ray inspection; FABRICATION; CERAMICS; LAYERS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The Article presents the manufacturing of a ceramic/electronic multichip module able to measure, to process and to display temperature and humidity on a liquid crystal display (LCD). Presented device is battery fed. Moreover, the structure was analyzed by X-ray inspection. Via filler construction and an injection filling method is presented and described.
引用
收藏
页码：489 / 492
页数：4
相关论文
共 50 条
  • [31] Temperature and Humidity Controlled Test Bench for Temperature Sensor Characterization
    Syed Usman Amin
    Muhammad Aaquib Shahbaz
    Syed Arsalan Jawed
    Fahd Khan
    Muhammad Junaid
    Danish Kaleem
    Musaddiq Siddiq
    Zain Warsi
    Journal of Electronic Testing, 2022, 38 : 453 - 461
  • [32] HUMIDITY SENSOR UTILIZING PLATINUM THIN-FILM TEMPERATURE SENSOR
    TSUDA, T
    ANDOH, Y
    SHARP TECHNICAL JOURNAL, 1988, (39): : 93 - 96
  • [33] High temperature characteristic for wireless pressure LTCC-based sensor
    Tan Qiulin
    Kang Hao
    Qin Li
    Xiong Jijun
    Liu Jun
    Xue Chenyang
    Zhang Wendong
    Luo Tao
    Microsystem Technologies, 2015, 21 : 209 - 214
  • [34] High temperature characteristic for wireless pressure LTCC-based sensor
    Tan Qiulin
    Kang Hao
    Qin Li
    Xiong Jijun
    Liu Jun
    Xue Chenyang
    Zhang Wendong
    Luo Tao
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015, 21 (01): : 209 - 214
  • [35] Design of a Temperature and Humidity Monitoring/Sending System Based on SHT1 Temperature and Humidity Sensor
    Guo, Jun
    Tian, Mu-Qin
    Tian, Mu-Ling
    EMERGING RESEARCH IN ARTIFICIAL INTELLIGENCE AND COMPUTATIONAL INTELLIGENCE, 2011, 237 : 388 - 391
  • [36] High temperature LTCC package for SiC-based gas sensor
    Nowak, Damian
    Kulczak, Dariusz
    Januszkiewicz, Maksymilian
    Dziedzic, Andrzej
    OPTICA APPLICATA, 2009, 39 (04) : 701 - 704
  • [37] Design and performance analysis of soil temperature and humidity sensor
    Shi, W.
    Zhang, S.
    Wang, M.
    Zheng, W.
    IFAC PAPERSONLINE, 2018, 51 (17): : 586 - 590
  • [38] Humidity sensor with manganese oxide for room temperature use
    Xu, Chao-Nan
    Miyazaki, Kazuhide
    Sensors and Actuators, B: Chemical, 1993, B14 (1 -3 pt 2) : 523 - 524
  • [39] Investigation into a novel humidity sensor operating at room temperature
    Arshak, KI
    Twomey, K
    MICROELECTRONICS JOURNAL, 2002, 33 (03) : 213 - 220
  • [40] A Smart Gas Sensor Insensitive to Humidity and Temperature Variations
    Hajmirzaheydarali, Mohammadreza
    Ghafarinia, Vahid
    CONFERENCE ON ADVANCED MATERIALS AND NANOTECHNOLOGY (CAMAN 2009), 2011, 17
12345