Mechanisms of sputtering of platinum by ions of inert gases

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作者：

Kulikauskas, VS

Mashkova, ES

Molchanov, VA

Khaydarov, AA

Chernysh, VS

Eckstein, W

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IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 2000年 / 64卷 / 04期

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O4 [物理学];

学科分类号：

0702 ;

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页码：639 / 644

页数：6

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