Mechanisms of sputtering of platinum by ions of inert gases

被引：0
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作者：
Kulikauskas, VS
Mashkova, ES
Molchanov, VA
Khaydarov, AA
Chernysh, VS
Eckstein, W
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来源：
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 2000年 / 64卷 / 04期
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O4 [物理学];
学科分类号：
0702 ;
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页码：639 / 644
页数：6
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