New applications for LTPS array technology including lab-on-chip and MEMS actuators

被引：0

作者：

Young, Nigel D. ^{[1
]}

Fish, David A. ^{[1
]}

Ponjee, Marc W. G. ^{[2
]}

Trainor, Michael J. ^{[2
]}

机构：

[1] Philips Res, Cambridge CB4 0FY, England

[2] Philips Res Labs, Eindhoven, Netherlands

来源：

JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY | 2010年 / 18卷 / 08期

关键词：

LTPS; polysilicon; lab-on-chip; MEMS; sensors; TEMPERATURE POLY-SI; GLASS;

D O I：

10.1889/JSID18.8.558

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The use of low-temperature poly-Si technology for new applications beyond displays is presented. These applications include lab-on-chip, MEMS actuators, and sensors. As a key example, the use of high-voltage poly-Si TFTs for rapid heating and temperature control, as is required for DNA amplification within lab-on-chip, is described in detail. Other examples given include MEMS ink-jet printer heads and the formation of photosensors and impedance sensors for optical and electronic input, which can be used not only in displays and lab-on-chip, but also for new applications such as fingerprint sensing and particle counting.

引用

页码：558 / 563

页数：6

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