New applications for LTPS array technology including lab-on-chip and MEMS actuators

被引:0
|
作者
Young, Nigel D. [1 ]
Fish, David A. [1 ]
Ponjee, Marc W. G. [2 ]
Trainor, Michael J. [2 ]
机构
[1] Philips Res, Cambridge CB4 0FY, England
[2] Philips Res Labs, Eindhoven, Netherlands
关键词
LTPS; polysilicon; lab-on-chip; MEMS; sensors; TEMPERATURE POLY-SI; GLASS;
D O I
10.1889/JSID18.8.558
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The use of low-temperature poly-Si technology for new applications beyond displays is presented. These applications include lab-on-chip, MEMS actuators, and sensors. As a key example, the use of high-voltage poly-Si TFTs for rapid heating and temperature control, as is required for DNA amplification within lab-on-chip, is described in detail. Other examples given include MEMS ink-jet printer heads and the formation of photosensors and impedance sensors for optical and electronic input, which can be used not only in displays and lab-on-chip, but also for new applications such as fingerprint sensing and particle counting.
引用
收藏
页码:558 / 563
页数:6
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