New applications for LTPS array technology including lab-on-chip and MEMS actuators

被引：0

作者：

Young, Nigel D. ^{[1
]}

Fish, David A. ^{[1
]}

Ponjee, Marc W. G. ^{[2
]}

Trainor, Michael J. ^{[2
]}

机构：

[1] Philips Res, Cambridge CB4 0FY, England

[2] Philips Res Labs, Eindhoven, Netherlands

来源：

JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY | 2010年 / 18卷 / 08期

关键词：

LTPS; polysilicon; lab-on-chip; MEMS; sensors; TEMPERATURE POLY-SI; GLASS;

D O I：

10.1889/JSID18.8.558

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The use of low-temperature poly-Si technology for new applications beyond displays is presented. These applications include lab-on-chip, MEMS actuators, and sensors. As a key example, the use of high-voltage poly-Si TFTs for rapid heating and temperature control, as is required for DNA amplification within lab-on-chip, is described in detail. Other examples given include MEMS ink-jet printer heads and the formation of photosensors and impedance sensors for optical and electronic input, which can be used not only in displays and lab-on-chip, but also for new applications such as fingerprint sensing and particle counting.

引用

页码：558 / 563

页数：6

共 50 条

[1] Nanophotonics for Lab-on-Chip Applications
Seitz, Peter
NANO-NET, 2009, 20 : 151 - 160
[2] Printed photonics for lab-on-chip applications
Pieler, Roland
Fuereder, Erwin
Sonnleitner, Max
ELECTRO-OPTICAL REMOTE SENSING, DETECTION, AND PHOTONIC TECHNOLOGIES AND THEIR APPLICATIONS, 2007, 6739 : 73919 - 73919
[3] Random lasers for lab-on-chip applications
Giehl, J. M.
Butzbach, F.
Jorge, K. C.
Alvarado, M. A.
Carreno, M. N. P.
Alayo, M. I.
Wetter, N. U.
LASER SOURCES AND APPLICATIONS III, 2016, 9893
[4] ISFET Arrays for Lab-on-Chip Technology : A Review
Moser, Nicolas
Keeble, Lewis
Rodriguez-Manzano, Jesus
Georgiou, Pantelis
2019 26TH IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS AND SYSTEMS (ICECS), 2019, : 57 - 60
[5] Lab-on-chip technology for chronic disease diagnosis
Wu, Jiandong
Dong, Meili
Rigatto, Claudio
Liu, Yong
Lin, Francis
NPJ DIGITAL MEDICINE, 2018, 1
[6] Lab-on-chip technology for chronic disease diagnosis
Jiandong Wu
Meili Dong
Claudio Rigatto
Yong Liu
Francis Lin
npj Digital Medicine, 1
[7] Integrated optical systems for lab-on-chip applications
Hubner, J
Jorgensen, AM
Anhoj, TA
Zauner, DA
INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES IX, 2005, 5728 : 269 - 277
[8] A Microfluidic Packaging Technique for Lab-on-Chip Applications
Ghafar-Zadeh, Ebrahim
Sawan, Mohamad
Therriault, Daniel
IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2009, 32 (02): : 410 - 416
[9] Technologies and market trends for polymer MEMS in microfluidics and lab-on-chip
Andrieux, G
Eloy, JC
Mounier, E
Microfluidics, BioMEMS, and Medical Microsystems III, 2005, 5718 : 60 - 64
[10] Flexible illumination module for lab-on-chip applications
Mueller, Jan
Ghosh, Oindrila
Ramsteiner, Ingo
Fiess, Reinhold
Neumann, Cornelius
OPTICAL DIAGNOSTICS AND SENSING XXIV:TOWARD POINT-OF-CARE DIAGNOSTICS, 2024, 12850

← 1 2 3 4 5 →