Electron energy loss spectroscopy of plasmon resonances in titanium nitride thin films

被引:16
|
作者
Herzing, Andrew A. [1 ]
Guler, Urcan [2 ,3 ,4 ]
Zhou, Xiuli [5 ]
Boltasseva, Alexandra [2 ,3 ]
Shalaev, Vladimir [2 ,3 ]
Norris, Theodore B. [5 ]
机构
[1] Natl Inst Stand & Technol, Mat Measurement Lab, Gaithersburg, MD 20899 USA
[2] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[3] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[4] Nanometa Technol Inc, 1281 Win Hentschel Blvd, W Lafayette, IN 47906 USA
[5] Univ Michigan, Ctr Ultrafast Opt Sci, Ann Arbor, MI 48109 USA
关键词
SILVER; SURFACE; GOLD;
D O I
10.1063/1.4947442
中图分类号
O59 [应用物理学];
学科分类号
摘要
The plasmon resonance characteristics of refractory TiN thin films were analyzed using electron energy-loss spectroscopy (EELS). A bulk plasmon resonance was observed at 2.81 eV and a weaker surface plasmon resonance peak was detected at 2.05 eV. These findings are compared to finite-difference time-domain simulations based on measured optical data. The calculated values for both the bulk and surface resonances (2.74 eV and 2.15 eV, respectively) show reasonable agreement with those measured via EELS. The amplitude of the experimentally observed surface resonance was weaker than that typically encountered in noble metal nanostructures, and this is discussed in the context of electron density and reduced spatial confinement of the resonance mode in the thin-film geometry. Published by AIP Publishing.
引用
收藏
页数:4
相关论文
共 50 条
  • [41] STUDY OF BORON-NITRIDE BY ELECTRON ENERGY-LOSS SPECTROSCOPY
    HOSOI, J
    OIKAWA, T
    INOUE, M
    MATSUI, Y
    ENDO, T
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1982, 27 (03) : 243 - 254
  • [42] EFFECT OF BULK AND SURFACE OXIDATION ON ELECTRON-ENERGY LOSS CHARACTERISTICS OF TITANIUM THIN-FILMS
    BROUSSEAU, B
    FRANDON, J
    OUSTRY, A
    ESCAUT, A
    SURFACE SCIENCE, 1978, 71 (03) : 679 - 686
  • [43] Electron energy-loss spectroscopy and energy-filtered imaging of C60 thin films
    Shin, DH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (5A): : L559 - L561
  • [44] Electron-phonon-plasmon interaction in MBE-grown indium nitride - A high resolution electron energy loss spectroscopy (HREELS) study
    Kloeckner, K.
    Himmerlich, M.
    Koch, R. J.
    Polyakov, V. M.
    Eisenhardt, A.
    Haensel, T.
    Ahmed, S. I. -U.
    Krischok, S.
    Schaefer, J. A.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 2, 2010, 7 (02): : 173 - 176
  • [45] AN INVESTIGATION OF THIN TITANIUM DIBORIDE FILMS BY AUGER-ELECTRON SPECTROSCOPY
    OSIPOV, KA
    LAZAREV, EM
    BOROVICH, TL
    KOROTKOV, NA
    YUSIPOV, NY
    INORGANIC MATERIALS, 1981, 17 (04) : 417 - 420
  • [46] Electron Microscopy and Electron Energy Loss Spectroscopy of Thin Titanium Nitride Films in the TiNx/La:HfO2(Hf0.5Zr0.5O2)/TiNx/SiO2 System
    Suvorova E.I.
    Uvarov O.V.
    Klimenko A.A.
    Chizh K.V.
    Bulletin of the Russian Academy of Sciences: Physics, 2023, 87 (10) : 1466 - 1472
  • [47] Electron energy loss fine structure measurements of silicon nitride films
    Tsukajima, J
    Arai, K
    Takatoh, S
    Enokijima, T
    Hayashi, T
    Yikegaki, T
    Kashiwagi, A
    Tokunaga, K
    Suzuki, T
    Fujikawa, T
    Usami, S
    THIN SOLID FILMS, 1996, 281 : 318 - 320
  • [48] Energy loss spectroscopy of RuO2 thin films
    Mondio, G
    Neri, F
    Allegrini, M
    JOURNAL OF APPLIED PHYSICS, 1997, 82 (04) : 1730 - 1735
  • [49] STUDY OF TITANIUM CARBIDE PRECIPITATES IN TITANIUM DIBORIDE BY ELECTRON-ENERGY LOSS SPECTROSCOPY
    MOCHEL, P
    ALLISON, C
    WILLIAMS, WS
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1981, 64 (04) : 185 - 187
  • [50] Stress and strain in titanium nitride thin films
    Machunze, R.
    Janssen, G. C. A. M.
    THIN SOLID FILMS, 2009, 517 (20) : 5888 - 5893