Thermal analysis of a constant temperature pirani gauge based on micro-hotplate

被引：6
|
作者：
Zhang, Feng T. [1 ]
Tang, Zhen A. [1 ]
Yu, Jun. [1 ]
Jin, Ren C. [2 ]
机构：
[1] Dalian Univ Technol, Dept Elect Engn, Dalian, Peoples R China
[2] Dalian Univ Technol, Key Lab Microsyst & Micro Fabricat, Dalian, Peoples R China
来源：
2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2006年
基金：
中国国家自然科学基金;
关键词：
pirani; constant temperature; micro-hotplate; thermal conductivity;
D O I：
10.1109/NEMS.2006.334633
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micro-hotplate (MHP) based Pirani gauge is fabricated using surface-micromachining technology and measured with a typical constant temperature circuit The measured results show that its sensitive range is at least 10 similar to 10(5)Pa and can be widen when increasing working temperature. According to Fourier method and energy conservation law, heat conduction differential equations of the supporting beams are built and solved to determine the temperature distribution along the beams and beat losses through solid heat conduction at different pressure. Other heat loss mechanisms of the MHP square membrane are also investigated and it has proven that heat losses through solid heat conduction in micro Pirani increase with gas pressure at constant temperature, whereas they were always considered to be independent of gas pressure in previous studies.
引用
收藏
页码：1072 / +
页数：2
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