High-Q ring resonators in thin silicon-on-insulator

被引：54

作者：

Baehr-Jones, T ^{[1
]}

Hochberg, M ^{[1
]}

Walker, C ^{[1
]}

Scherer, A ^{[1
]}

机构：

[1] CALTECH, Pasadena, CA 91125 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 16期

关键词：

D O I：

10.1063/1.1781355

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have fabricated high-Q microrings from thin silicon-on-insulater SOI layers and measured Q values of 45 000 in these rings, which were then improved to 57 000 by adding a PMMA cladding. The optimal waveguide designs were calculated, and the waveguide losses were analyzed. These high-Q resonators are expected to lead to interesting devices for telecommunication filters and sources as well as optical refractive index sensing. (C) 2004 American Institute of Physics.

引用

页码：3346 / 3347

页数：2

共 50 条

[21] High-Confinement, High-Q Microring Resonators on Silicon Carbide-On-Insulator (SiCOI)
Zheng, Yi
Yi, Ailun
Pu, Minhao
Chang, Bingdong
You, Tiangui
Huang, Kai
Ou, Xin
Ou, Haiyan
2018 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP), 2018,
[22] Optimization approaches to achieve high-Q silicon slot waveguide ring resonators
Zhang, Weiwei
Serna, Samuel
Le Roux, Xavier
Vivien, Laurent
Cassan, Eric
2015 IEEE 12TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP), 2015, : 75 - 76
[23] Single-mode silicon-on-insulator elliptical microdisk resonators with high Q factors
Xiong, Kang
Xiao, Xi
Hu, Yingtao
Li, Zhiyong
Chu, Tao
Yu, Yude
Yu, Jinzhong
PHOTONICS AND OPTOLECTRONICS MEETINGS (POEM) 2011: OPTOELECTRONIC DEVICES AND INTEGRATION, 2011, 8333
[24] Widely Tunable Silicon-On-Insulator Ring Resonators with a Liquid Crystal Cladding
De Cort, Wout
Beeckman, Jeroen
Claes, Tom
Neyts, Kristiaan
Baets, Roel
2011 IEEE PHOTONICS CONFERENCE (PHO), 2011, : 541 - +
[25] Enhanced polarisation-independent optical ring resonators on silicon-on-insulator
Headley, WR
Reed, GT
Gardes, F
Liu, AS
Paniccia, M
Optoelectronic Integration on Silicon II, 2005, 5730 : 195 - 202
[26] Gas sensing performance of high-Q photonic crystal nanocavities based on a silicon-on-insulator platform
Kassa-Baghdouche, Lazhar
OPTICAL AND QUANTUM ELECTRONICS, 2021, 53 (01)
[27] Trimming of silicon-on-insulator ring resonators with a polymerizable liquid crystal cladding
Lambert, Sofie
De Cort, Wout
Beeckman, Jeroen
Neyts, Kristiaan
Baets, Roel
OPTICS LETTERS, 2012, 37 (09) : 1475 - 1477
[28] Wide tuning of silicon-on-insulator ring resonators with a liquid crystal cladding
De Cort, Wout
Beeckman, Jeroen
Claes, Tom
Neyts, Kristiaan
Baets, Roel
OPTICS LETTERS, 2011, 36 (19) : 3876 - 3878
[29] Trimming of Silicon-on-insulator Micro-ring Resonators by Laser Irradiation
Sharp, Graham J.
Klitis, Charalambos
Biryukova, Vera
Holmes, Barry
Sorel, Marc
2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC), 2017,
[30] Liquid sensor based on high-Q slot photonic crystal cavity in silicon-on-insulator configuration
Caer, Charles
Serna-Otalvaro, Samuel F.
Zhang, Weiwei
Le Roux, Xavier
Cassan, Eric
OPTICS LETTERS, 2014, 39 (20) : 5792 - 5794

← 1 2 3 4 5 →