Double beam RIF MEMS switches for wireless applications

被引：3
|
作者：
Lee, K [1 ]
Liu, R [1 ]
Kim, BC [1 ]
机构：
[1] Arizona State Univ, Dept Elect Engn, Tempe, AZ 85287 USA
来源：
ELECTRONICS LETTERS | 2003年 / 39卷 / 06期
关键词：
D O I：
10.1049/el:20030358
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A double cantilever beam MEMS switch has been developed for wireless applications. The two beams are controlled by a single actuation electrode. This switch has low pull-in voltage of 15 V and fast switching speed of 60 mus. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.
引用
收藏
页码：532 / 533
页数：2
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