Double beam RIF MEMS switches for wireless applications

被引：3
|
作者：
Lee, K [1 ]
Liu, R [1 ]
Kim, BC [1 ]
机构：
[1] Arizona State Univ, Dept Elect Engn, Tempe, AZ 85287 USA
来源：
ELECTRONICS LETTERS | 2003年 / 39卷 / 06期
关键词：
D O I：
10.1049/el:20030358
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A double cantilever beam MEMS switch has been developed for wireless applications. The two beams are controlled by a single actuation electrode. This switch has low pull-in voltage of 15 V and fast switching speed of 60 mus. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.
引用
收藏
页码：532 / 533
页数：2
相关论文
共 50 条
  • [21] RF MEMS switches for leakage control in wireless handheld devices
    Fruehling, Adam
    Hagner, Kyle
    Roy, Kaushik
    Peroulis, Dimitrios
    2007 IEEE ANTENNAS AND PROPAGATION SOCIETY INTERNATIONAL SYMPOSIUM, VOLS 1-12, 2007, : 97 - 100
  • [22] RF-MEMS switches with AlN dielectric and their applications
    Badia, Montserrat Fernandez-Bolanos
    Nicole, Pierre
    Ionescu, Adrian Mihai
    INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES, 2011, 3 (05) : 509 - 520
  • [23] Improving the time response of MEMS switches for RF applications
    El-Asmar, M.
    Hariri, Y.
    Domingue, F.
    Nerguizian, V.
    2006 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, VOLS 1-5, 2006, : 767 - +
  • [24] Mechatronic design of RF MEMS switches for communication applications
    Lai, YL
    Wen, YD
    2004 47TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL I, CONFERENCE PROCEEDINGS, 2004, : 365 - 368
  • [25] Single-pole double-throw switches using capacitive MEMS switches
    Maiczewski, A
    Pillans, B
    INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2004, 14 (04) : 383 - 387
  • [26] Beam Switching Reflectarray Monolithically Integrated With RF MEMS Switches
    Bayraktar, Omer
    Civi, Ozlem Aydin
    Akin, Tayfun
    IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2012, 60 (02) : 854 - 862
  • [27] Influence of beam geometry on the dielectric charging of RF MEMS switches
    Solazzi, Francesco
    Resta, Giuseppe
    Mulloni, Viviana
    Margesin, Benno
    Farinelli, Paola
    2011 6TH EUROPEAN MICROWAVE INTEGRATED CIRCUIT CONFERENCE, 2011, : 398 - 401
  • [28] AC actuation of fixed-fixed beam MEMS switches
    Wang, X
    Katehi, LPB
    Peroulis, D
    2006 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS, 2006, : 24 - +
  • [29] Novel Beam Design for Compact RF MEMS Series Switches
    Chan, King Yuk
    Daneshmand, Mojgan
    Mansour, Raafat R.
    Ramer, Rodica
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 191 - +
  • [30] Prospective applications of MEMS in wireless communications
    De Los Santos, HJ
    MICROMACHINED DEVICES AND COMPONENTS VI, 2000, 4176 : 196 - 203
12345