Mechatronic design of RF MEMS switches for communication applications

被引：0
|
作者：
Lai, YL [1 ]
Wen, YD [1 ]
机构：
[1] Natl Changhua Univ Educ, Dept Mechatron Engn, Changhua 500, Taiwan
来源：
2004 47TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL I, CONFERENCE PROCEEDINGS | 2004年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.
引用
收藏
页码：365 / 368
页数：4
相关论文
共 50 条
  • [31] Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars
    Feng, Hongbo
    Zhao, Jiabin
    Zhou, Chengsi
    Song, Mingxin
    SENSORS, 2022, 22 (22)
  • [32] Novel Beam Design for Compact RF MEMS Series Switches
    Chan, King Yuk
    Daneshmand, Mojgan
    Mansour, Raafat R.
    Ramer, Rodica
    2007 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2007, : 191 - +
  • [33] Design, Fabrication and Characterization of RF MEMS Switches with Robust Contact
    Pustan, Marius
    Birleanu, Corina
    Dudescu, Cristian
    Chiorean, Radu
    Muller, Raluca
    Baracu, Angela
    2017 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP 2017), 2017,
  • [34] Design of phase shifters based on RF MEMS shunt Switches
    Bartolucci, Giancarlo
    Marcelli, Romolo
    Minucci, Gianluca
    Catoni, Simone
    Margesin, Benno
    Giacomozzi, Flavio
    CAS 2005: INTERNATIONAL SEMICONDUCTOR CONFERENCE, 2005, 1-2 : 103 - 106
  • [35] Design and manufacturing of X-band RF MEMS switches
    Savin, Evgeny A.
    Chadin, Kirill A.
    Kirtaev, Roman V.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (06): : 2783 - 2788
  • [36] Design and manufacturing of X-band RF MEMS switches
    Evgeny A. Savin
    Kirill A. Chadin
    Roman V. Kirtaev
    Microsystem Technologies, 2018, 24 : 2783 - 2788
  • [37] Efficient design methodology of polymer based RF MEMS switches
    Ducarouge, B
    Dubuc, D
    Mellé, S
    Grenier, K
    Bary, L
    Pons, P
    Plana, R
    2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Digest of Papers, 2004, : 298 - 301
  • [38] Design and Analysis of RF MEMS Cantilever Switches for Parameter Enhancement
    Khan, Aamir Saud
    Shanmuganantham, Thangavelu
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2018, 19 (03) : 179 - 187
  • [39] MEMS micro-switches for use in DC, RF, and optical applications
    Suzuki, K
    MICROPROCESSES AND NANOTECHNOLOGY 2001, DIGEST OF PAPERS, 2001, : 48 - 49
  • [40] RADIATION SENSITIVITY OF OHMIC RF-MEMS SWITCHES FOR SPATIAL APPLICATIONS
    Tazzoli, A.
    Cellere, G.
    Autizi, E.
    Peretti, V.
    Paccagnella, A.
    Meneghesso, G.
    IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, : 634 - 637
12345