Mechatronic design of RF MEMS switches for communication applications

被引：0
|
作者：
Lai, YL [1 ]
Wen, YD [1 ]
机构：
[1] Natl Changhua Univ Educ, Dept Mechatron Engn, Changhua 500, Taiwan
来源：
2004 47TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL I, CONFERENCE PROCEEDINGS | 2004年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.
引用
收藏
页码：365 / 368
页数：4
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