Residual stresses in silicon and their evolution upon heat treatment and irradiation

被引：1

作者：

Matyash, I. E. ^{[1
]}

Minailova, I. A. ^{[1
]}

Serdega, B. K. ^{[1
]}

Khirunenko, L. I. ^{[2
]}

机构：

[1] Natl Acad Sci Ukraine, Lashkaryov Inst Semicond Phys, UA-03028 Kiev, Ukraine

[2] Natl Acad Sci Ukraine, Inst Phys, UA-03028 Kiev, Ukraine

来源：

SEMICONDUCTORS | 2017年 / 51卷 / 09期

关键词：

DEFECTS FORMATION; OXYGEN;

D O I：

10.1134/S1063782617090147

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The distributions of internal stresses in undoped and tin-doped silicon and the influence of electron irradiation with an energy of 5 MeV and of heat treatment at 450A degrees C on the stresses are studied. The stresses are measured by a method based on the detection of birefringence by modulation polarimetry. It is shown that tin-doped silicon includes stripes of point defects with a nonuniform distribution of residual stresses of up to 20 kg cm(-2). Heat treatment at 450A degrees C induces an increase in the residual stresses in the sample to 50 kg cm(-2). It is established that the radiation defects formed upon the irradiation of tin-doped silicon reduce the residual stresses to 2-3 kg cm(-2).

引用

页码：1107 / 1110

页数：4

共 50 条

[21] Influence of various quenching agents on residual stresses in steel after heat treatment
Grum, J
Bozic, S
Zupancic, M
ECRS 5: PROCEEDINGS OF THE FIFTH EUROPEAN CONFERENCE ON RESIDUAL STRESSES, 2000, 347-3 : 621 - 626
[22] Effect of Heat Treatment on Residual Stresses in the Zone of Fusion of Austenitic and Vessel Steels
A. A. Khlybov
Metal Science and Heat Treatment, 2016, 58 : 426 - 430
[23] Numerical studies of post weld heat treatment on residual stresses in welded impeller
Zhang, Z.
Ge, P.
Zhao, G. Z.
INTERNATIONAL JOURNAL OF PRESSURE VESSELS AND PIPING, 2017, 153 : 1 - 14
[24] Influence of heat treatment and grinding conditions on surface residual stresses in the production of rollers
Gueley, Volkan
Tekkaya, A. Erman
Savas, Turhan
Ozhan, Feridun
RESIDUAL STRESSES VII, 2006, 524-525 : 317 - 322
[25] Residual stresses in green bodies of steel powder and their relaxation during heat treatment
Luukkonen, P
Ericsson, T
HEAT TREATING, VOLS 1 AND 2, PROCEEDINGS, 2000, : 435 - 440
[26] RESIDUAL STRESSES AT AN OXIDE-SILICON INTERFACE
WHELAN, MV
GOEMANS, AH
GOOSSENS, LM
APPLIED PHYSICS LETTERS, 1967, 10 (10) : 262 - &
[27] CONTROLLING RESIDUAL-STRESSES IN 52100 BEARING STEEL BY HEAT-TREATMENT
STICKELS, CA
JANOTIK, AM
METAL PROGRESS, 1981, 120 (04): : 34 - 40
[28] Effect of Heat Treatment on Residual Stresses in the Zone of Fusion of Austenitic and Vessel Steels
Khlybov, A. A.
METAL SCIENCE AND HEAT TREATMENT, 2016, 58 (7-8) : 426 - 430
[29] Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films
Yang, Ying
Zhao, Shengsheng
Gong, Jun
Jiang, Xin
Sun, Chao
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2011, 27 (05) : 385 - 392
[30] MECHANISM OF FORMATION OF THE ANOMALOUS DISTRIBUTION OF RESIDUAL STRESSES IN HEAT TREATMENT OF SINGLE CRYSTALS
REZNIKOV, BA
SOVIET PHYSICS-SOLID STATE, 1964, 5 (09): : 1845 - 1847

← 1 2 3 4 5 →