Demonstration of aluminum-free metamorphic InP/In0.53Ga0.47As/InP double heterojunction bipolar transistors on GaAs substrates

被引:26
|
作者
Wang, H [1 ]
Ng, GI [1 ]
Zheng, HQ [1 ]
Xiong, YZ [1 ]
Chua, LH [1 ]
Yuan, KH [1 ]
Radhakrishnan, K [1 ]
Yoon, SF [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ctr Microelect, Singapore 639798, Singapore
关键词
GaAs; HBT; InP/InGaAs; metamorphic;
D O I
10.1109/55.863099
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report, for the first time, the successful fabrication of aluminum-free metamorphic (MM) InP/In-0.53 Ga0.47As/InP double heterojunction bipolar transistors (DHBTs) on GaAs substrates with a linearly graded InxGa1-xP buffer grown by solid-source molecular beam epitaxy (SSMBE), Device with 5 x 5 mu m(2) emitter displays a peak current gain of 40 and a common-emitter breakdown voltage (BVCEO) higher than 9 V, a current gain cut-off frequency (f(T)) of 48 GHz and a maximum oscillation frequency (f(max)) of 42 GHz, A minimum noise figure of 2.9 dB and associated gain of 19.5 dB were measured at a collector current level of 2.6 mA at 2 GHz. Detailed analysis suggests that the degradation of the base-emitter heterojunction interface and the increase of bulk recombination are the most probable causes for the poorer device performance of the current metamorphic HBTs compared to the lattice-matched HBTs.
引用
收藏
页码:427 / 429
页数:3
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