Thermo-electro-mechanical simulations of gas sensors based on SOI membranes

被引：0

作者：

Lu, CC ^{[1
]}

Setiadi, D ^{[1
]}

Udrea, F ^{[1
]}

Milne, WI ^{[1
]}

Covington, JA ^{[1
]}

Gardner, JW ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年

关键词：

solid-state gas sensors; electro-thermal-mechanical simulations; SOI devices; multilayer membrane; and device optimization;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

3D thermo-electro-mechanical device simulations are presented of a novel fully CMOS-compatible MOSFET gas sensor operating in a SOI membrane. A comprehensive stress analysis of a Si-SiO2-based multilayer membrane has been performed to ensure a high degree of mechanical reliability at a high operating temperature (e.g. up to 400degreesC). Moreover, optimisation of the layout dimensions of the SOI membrane, in particular the aspect ratio between the membrane length and membrane thickness, has been carried out to find the best trade-off between minimal device power consumption and acceptable mechanical stress.

引用

页码：297 / 300

页数：4

共 50 条

[21] Dynamic thermo-electro-mechanical performance of piezoelectric stack actuators
Senousy, M. S.
Li, F. X.
Mumford, D.
Gadala, M.
Rajapakse, R. K. N. D.
BEHAVIOR AND MECHANICS OF MULTIFUNCTIONAL AND COMPOSITE MATERIALS 2007, 2007, 6526
[22] Architected cellular piezoelectric metamaterials: Thermo-electro-mechanical properties
Shi, J.
Akbarzadeh, A. H.
ACTA MATERIALIA, 2019, 163 : 91 - 121
[23] Thermo-electro-mechanical behaviour of Nano-sized structures
Repka, Miroslav
Sator, Ladislav
4TH INTERNATIONAL SCIENTIFIC CONFERENCE STRUCTURAL AND PHYSICAL ASPECTS OF CONSTRUCTION ENGINEERING (SPACE 2019), 2020, 310
[24] Thermo-electro-mechanical instability of an inflated electro-active polymer cylindrical shell
Liu, Guanzhong
Ren, Jiusheng
MATERIALS RESEARCH EXPRESS, 2019, 6 (04)
[25] Thermo-electro-mechanical coupling problems solved by FE-formulation
Bouranta, K.
Malegiannakis, G.A.
Kröplin, B.
Engineering Computations (Swansea, Wales), 1998, 15 (06): : 804 - 828
[26] Dynamic testing of micromechanical structures under thermo-electro-mechanical influences
Rinaldi, Gino
Packirisamy, Muthukumaran
Stiharu, Ion
MEASUREMENT, 2007, 40 (06) : 563 - 574
[27] An Incrementally Coupled Thermo-Electro-Mechanical Model for Resistance Spot Welding
Hashemi, Ramin
Pashazadeh, Hamed
Hamedi, Mohsen
MATERIALS AND MANUFACTURING PROCESSES, 2012, 27 (12) : 1442 - 1449
[28] Cylindrical bending of hybrid laminates under thermo-electro-mechanical loading
Univ of Kentucky, Lexington, United States
J Therm Stresses, 3 (287-296):
[29] Thermo-electro-mechanical behavior of an advanced smart lightweight sandwich plate
Moradi-Dastjerdi, Rasool
Behdinan, Kamran
AEROSPACE SCIENCE AND TECHNOLOGY, 2020, 106
[30] Thermo-Electro-Mechanical Performance Assessment of Piezoelectric Actuators for Fuel Injectors
Senousy, M. S.
Rajapakse, R. K. N. D.
Gadala, M. S.
Mumford, D.
ACTUATOR 10, CONFERENCE PROCEEDINGS, 2010, : 628 - +

← 1 2 3 4 5 →