[1] Vienna Univ Technol, Inst Microelect, A-1040 Vienna, Austria
来源:
SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 2004
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2004年
关键词:
D O I:
暂无
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
We present a computational method for three-dimensional tetrahedral mesh refinement according to the demands of oxidation simulation. The main focus lies on two major problems. First, the start-up condition of oxidation claims an initial mesh preparation which is done by the so called Laplace refinement, second the transient conversion of silicon (Si) to silicon dioxide (SiO2) forces a high spatial resolution in a small area around the material interface which shows the need of adaptive refinement on demand. More over our approach takes anisotropy into account to keep the amount of elements small compared to strict isotropic refinement.
机构:
Univ N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USAUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Cevidanes, Lucia H. C.
Tucker, Scott
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Wake Forest Univ, Bowman Gray Sch Med, Winston Salem, NC USAUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Tucker, Scott
Styner, Martin
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Univ N Carolina, Dept Psychiat, Chapel Hill, NC 27599 USA
Univ N Carolina, Dept Comp Sci, Chapel Hill, NC 27599 USAUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Styner, Martin
Kim, Hyungmin
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机构:
Maurice Muller Inst, Bern, SwitzerlandUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Kim, Hyungmin
Chapuis, Jonas
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机构:
NEXThink, Lausanne, SwitzerlandUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Chapuis, Jonas
Reyes, Mauricio
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机构:
ARTORG Ctr Biomed Engn Res, Med Image Anal Grp, Basel, SwitzerlandUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Reyes, Mauricio
Proffit, William
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机构:
Univ N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USAUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Proffit, William
Turvey, Timothy
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机构:
Univ N Carolina, Sch Dent, Dept Oral & Maxillofacial Surg, Chapel Hill, NC 27599 USAUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
Turvey, Timothy
Jaskolka, Michael
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机构:
Univ N Carolina, Sch Dent, Dept Oral & Maxillofacial Surg, Chapel Hill, NC 27599 USAUniv N Carolina, Sch Dent, Dept Orthodont, Chapel Hill, NC 27599 USA
机构:
Univ Saarland, Math Image Anal Grp, Fac Math & Comp Sci, D-66041 Saarbrucken, GermanyUniv Saarland, Math Image Anal Grp, Fac Math & Comp Sci, D-66041 Saarbrucken, Germany