Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

被引：15
|
作者：
Lyu, Fei [1 ]
Zhang, Zhenyan [1 ]
Toh, Eng-Huat [2 ]
Liu, Xinfu [2 ]
Ding, Yinjie [2 ]
Pan, Yifan [3 ]
Li, Chengjie [1 ]
Li, Li [1 ]
Sha, Jin [1 ]
Pan, Hongbing [1 ]
机构：
[1] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
[2] GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore
[3] Nanjing Foreign Language Sch, Nanjing 210008, Peoples R China
来源：
SENSORS | 2015年 / 15卷 / 01期
基金：
高等学校博士学科点专项科研基金;
关键词：
cross-like Hall plate; sensitivity; offset; P-type covering layer; OFFSET REDUCTION; DEVICES; SENSOR; SILICON; MODEL;
D O I：
10.3390/s150100672
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
引用
收藏
页码：672 / 686
页数：15
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