In-situ Optical Temperature Measurement in Micro-Scale during Ultrafast Laser 3D Nanolithography

被引:0
|
作者
Varapnickas, S. [1 ]
Queiroz, J. B. [2 ]
Baziulyte-Paulaviciene, D. [3 ]
Sakirzanovas, S. [3 ]
Malinauskas, M. [1 ]
机构
[1] Vilnius Univ, Fac Phys, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
[2] Univ Coimbra, Fac Sci & Technol, Dept Phys, Rua Larga, P-3004516 Coimbra, Portugal
[3] Vilnius Univ, Fac Chem & Geosci, Naugarduko St 24, LT-03225 Vilnius, Lithuania
来源
2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC) | 2019年
关键词
D O I
10.1109/cleoe-eqec.2019.8872743
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页数:1
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