In-situ Optical Temperature Measurement in Micro-Scale during Ultrafast Laser 3D Nanolithography

被引：0
|
作者：
Varapnickas, S. [1 ]
Queiroz, J. B. [2 ]
Baziulyte-Paulaviciene, D. [3 ]
Sakirzanovas, S. [3 ]
Malinauskas, M. [1 ]
机构：
[1] Vilnius Univ, Fac Phys, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
[2] Univ Coimbra, Fac Sci & Technol, Dept Phys, Rua Larga, P-3004516 Coimbra, Portugal
[3] Vilnius Univ, Fac Chem & Geosci, Naugarduko St 24, LT-03225 Vilnius, Lithuania
来源：
2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC) | 2019年
关键词：
D O I：
10.1109/cleoe-eqec.2019.8872743
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：1
相关论文
共 50 条
  • [21] Femtosecond laser induced damage threshold (LIDT) of 3D nanolithography made micro- and nano-optical elements
    Butkute, Agne
    Jonusauskas, Linas
    Gailevicius, Darius
    Mizeikis, Vygantas
    Malinauskas, Mangirdas
    LASER 3D MANUFACTURING VI, 2019, 10909
  • [22] EFFECT OF MULTIPLE PULSES ON THE DEFORMATION BEHAVIOR OF ULTRATHIN METAL FOILS IN 3D MICRO-SCALE LASER DYNAMIC FORMING
    Li, Ji
    Cheng, Gary J.
    PROCEEDINGS OF THE ASME INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE 2010, VOL 2, 2011, : 299 - 306
  • [23] Fabrication of hollow, 3D, micro-scale metallic structures by micro-powder injection moulding
    Attia, Usama M.
    Alcock, Jeffrey R.
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2012, 212 (10) : 2148 - 2153
  • [24] The application of moire inversion technique in the characterization of micro-scale 3D periodic structures
    Wu, Dan
    Xie, Huimin
    Huang, Dejin
    Qin, Kun
    OPTICS AND LASERS IN ENGINEERING, 2018, 106 : 132 - 138
  • [25] Thermal Probe Nanolithography: in-situ inspection, high-speed, high-resolution, 3D
    Holzner, Felix
    Paul, Philip
    Despont, Michel
    Cheong, Lin Lee
    Hedrick, James
    Duerig, Urs
    Knoll, Armin
    29TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2013, 8886
  • [26] Study of 3D in-situ stress measurement and stability of roadways in depth
    Zhang Bai-hong
    Han Li-jun
    Han Gui-lei
    Wang Yan-ning
    ROCK AND SOIL MECHANICS, 2008, 29 (09) : 2547 - +
  • [27] The in-situ 3D measurement system combined with CNC machine tools
    Zhao, Huijie
    Jiang, Hongzhi
    Li, Xudong
    Sui, Shaochun
    Tang, Limin
    Liang, Xiaoyue
    Diao, Xiaochun
    Dai, Jiliang
    INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013), 2013, 8769
  • [28] Development of Method for In-situ Micro-Scale Observation of Stress Corrosion Cracking in High-Temperature Primary Water Environment
    Shin, Jung-Ho
    Lee, Jong-Yeon
    Kim, Sung-Woo
    CORROSION SCIENCE AND TECHNOLOGY-KOREA, 2023, 22 (04): : 265 - 272
  • [29] 3D Micro-printing of Optical Temperature Probes
    Wickberg, Andreas
    Mueller, Jonathan B.
    Mange, Yatin J.
    Nann, Thomas
    Wegener, Martin
    NANO-OPTICS: PRINCIPLES ENABLING BASIC RESEARCH AND APPLICATIONS, 2017, : 475 - 475
  • [30] The Optical Resiliency of Direct Laser Writing 3D Nanolithography Produced Microstructures to Intense Irradiation
    Jonusauskas, Linas
    Gailevicius, Darius
    Gadonas, Roaldas
    Melninkaitis, Andrius
    Malinauskas, Mangirdas
    2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC), 2017,
12345