A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition

被引：29

作者：

Kimura, Takashi ^{[1
]}

Ohashi, Haruhiko ^{[2
]}

Mimura, Hidekazu ^{[1
]}

Yamakawa, Daisuke ^{[1
]}

Yumoto, Hirokatsu ^{[2
]}

Matsuyama, Satoshi ^{[1
]}

Tsumura, Takashi ^{[3
]}

Okada, Hiromi ^{[3
]}

Masunaga, Tatsuhiko ^{[3
]}

Senba, Yasunori ^{[2
]}

Goto, Shunji ^{[2
]}

Ishikawa, Tetsuya ^{[2
,4
]}

Yamauchi, Kazuto ^{[1
,5
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, Suita, Osaka 5650871, Japan

[2] SPring 8 Japan Synchrotron Radiat Res Inst, Sayo, Hyogo 6795198, Japan

[3] JTEC Corp, Chuo Ku, Kobe, Hyogo 6500047, Japan

[4] SPring 8 RIKEN, Sayo, Hyogo 6795198, Japan

[5] Osaka Univ, Grad Sch Engn, Ctr Ultra Precis Sci & Technol, Suita, Osaka 5650871, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

X-ray focusing; X-ray mirror; Interferometric measurement; MSI; RADSI; SPATIAL-RESOLUTION; MICROSCOPY;

D O I：

10.1016/j.nima.2009.11.014

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In the third- and coming fourth-generation synchrotron radiation facilities, X-rays having both high brightness and high coherency can be utilized. Such X-rays require high accuracy in the reflective optics. In this study, we developed an ultra-precise measurement instrumentation for tangentially long X-ray mirrors using a Fizeau interferometer. In the system, the mirror figure is measured by stitching the subaperture profiles measured by the relative-angle determinable stitching interferometry, which we developed previously. High measurement accuracy of approximately 2 nm (peak to valley) was achieved in the measurement of a 400 mm-long aspherical surface. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：229 / 232

页数：4

共 50 条

[41] The Spectral X-ray Imaging Data Acquisition (SpeXIDAQ) Framework
Van Assche, Frederic
Vanheule, Sander
Van Hoorebeke, Luc
Boone, Matthieu N.
SENSORS, 2021, 21 (02) : 1 - 19
[42] Design of X-ray Digital Imaging and Data Acquisition System
Wang Kang-yi
Cheng Yao-yu
RUSSIAN JOURNAL OF NONDESTRUCTIVE TESTING, 2009, 45 (05) : 362 - 366
[43] Optimizing data acquisition and analysis of morphometric x-ray absorptiometry
Rea, JA
Steiger, P
Blake, GM
Fogelman, I
OSTEOPOROSIS INTERNATIONAL, 1998, 8 (02) : 177 - 183
[44] Optimizing data acquisition and analysis of morphometric X-ray absorptiometry
J. A. Rea
P. Steiger
G. M. Blake
I. Fogelman
Osteoporosis International, 1998, 8 : 177 - 183
[45] Design of X-ray digital imaging and data acquisition system
Kang-yi Wang
Yao-yu Cheng
Russian Journal of Nondestructive Testing, 2009, 45 : 362 - 366
[46] Data Acquisition Analysis for Femoral Morphometric X-Ray Absorptiometry
Boudousq, Vincent
Nalda, Enrique
Jaegler, Enric
Thomas, Eric
Dinten, Jean Marc
Collombier, Laurent
Boisson, Nicolas
Demattei, Christophe
Kotzki, Pierre-Olivier
JOURNAL OF CLINICAL DENSITOMETRY, 2009, 12 (02) : 177 - 185
[47] X-ray pole figure measurement and texture mapping of selected areas using an X-ray scanning apparatus
Fischer, AH
Schwarzer, RA
TEXTURE AND ANISOTROPY OF POLYCRYSTALS, 1998, 273-2 : 255 - 262
[48] First demonstration of X-ray mirrors using focused ion beam
Numazawa, Masaki
Ezoe, Yuichiro
Ishikawa, Kumi
Ogawa, Tomohiro
Sato, Mayu
Nakamura, Kasumi
Takeuchi, Kazuma
Terada, Masaru
Ohashi, Takaya
Mitsuda, Kazuhisa
Kelley, Ron
Murata, Kaoru
JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (06)
[49] Measurement and control of the bending of x-ray mirrors using speckle interferometry
Jacquot, P
Facchini, M
Mattenet, M
Grübel, G
LASER INTERFEROMETRY X: TECHNIQUES AND ANALYSIS AND APPLICATIONS, PTS A AND B, 2000, 4101 : 360 - 368
[50] ADVANTAGES OF X-RAY REFLECTOMETRY EXPERIMENTS USING GOBEL MIRRORS.
LaPuma, P. J.
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 1996, 52 : C503 - C503

← 1 2 3 4 5 →