A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition

被引：29

作者：

Kimura, Takashi ^{[1
]}

Ohashi, Haruhiko ^{[2
]}

Mimura, Hidekazu ^{[1
]}

Yamakawa, Daisuke ^{[1
]}

Yumoto, Hirokatsu ^{[2
]}

Matsuyama, Satoshi ^{[1
]}

Tsumura, Takashi ^{[3
]}

Okada, Hiromi ^{[3
]}

Masunaga, Tatsuhiko ^{[3
]}

Senba, Yasunori ^{[2
]}

Goto, Shunji ^{[2
]}

Ishikawa, Tetsuya ^{[2
,4
]}

Yamauchi, Kazuto ^{[1
,5
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, Suita, Osaka 5650871, Japan

[2] SPring 8 Japan Synchrotron Radiat Res Inst, Sayo, Hyogo 6795198, Japan

[3] JTEC Corp, Chuo Ku, Kobe, Hyogo 6500047, Japan

[4] SPring 8 RIKEN, Sayo, Hyogo 6795198, Japan

[5] Osaka Univ, Grad Sch Engn, Ctr Ultra Precis Sci & Technol, Suita, Osaka 5650871, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2010年 / 616卷 / 2-3期

关键词：

X-ray focusing; X-ray mirror; Interferometric measurement; MSI; RADSI; SPATIAL-RESOLUTION; MICROSCOPY;

D O I：

10.1016/j.nima.2009.11.014

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In the third- and coming fourth-generation synchrotron radiation facilities, X-rays having both high brightness and high coherency can be utilized. Such X-rays require high accuracy in the reflective optics. In this study, we developed an ultra-precise measurement instrumentation for tangentially long X-ray mirrors using a Fizeau interferometer. In the system, the mirror figure is measured by stitching the subaperture profiles measured by the relative-angle determinable stitching interferometry, which we developed previously. High measurement accuracy of approximately 2 nm (peak to valley) was achieved in the measurement of a 400 mm-long aspherical surface. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：229 / 232

页数：4

共 50 条

[31] AUTOMATED DATA ACQUISITION IN X-RAY STRUCTURE ANALYSIS
ENGLMEIER, HP
HOPPE, W
MESSTECHNIK, 1969, 77 (11): : 265 - +
[32] Data acquisition system of SSPA for X-ray detection
Li, Bing
Pan, Yinsong
Shen, Qihu
Yuan, Xianghui
Shu Ju Cai Ji Yu Chu Li/Journal of Data Acquisition & Processing, 2000, 15 (02): : 231 - 234
[33] Metrological characterization of a Large Aperture Fizeau for x-ray mirrors measurement
Vannoni, Maurizio
Martin, Idoia Freijo
MODELING ASPECTS IN OPTICAL METROLOGY V, 2015, 9526
[34] Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction
Shimamura, Takenori
Takeo, Yoko
Kimura, Takashi
Perrin, Francois
Vivo, Amparo
Senba, Yasunori
Kishimoto, Hikaru
Ohashi, Haruhiko
Mimura, Hidekazu
REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (04):
[35] Monochromatic mammography using scanning multilayer X-ray mirrors
Windt, David L.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2018, 89 (08):
[36] Ultrasoft x-ray spectroscopy using multilayer mirrors on TCV
Piffl, V
Weisen, H
Zabolotsky, A
PLASMA PHYSICS AND CONTROLLED FUSION, 2004, 46 (11) : 1659 - 1674
[37] X-RAY POLE FIGURE MEASUREMENT USING AN AREA DETECTOR
KLEIN, H
PARK, NJ
NAUERGERHARDT, CU
ZEITSCHRIFT FUR METALLKUNDE, 1994, 85 (08): : 574 - 580
[38] X-ray mirror figure correction using differential deposition
Morawe, Ch
Laboure, S.
Perrin, F.
Vivo, A.
Barrett, R.
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS XIX, 2024, 13150
[39] ESTIMATING REMANENT MAGNETIZATION FROM X-RAY POLE FIGURE DATA
HERBST, JF
TRACY, JC
JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 4283 - 4284
[40] Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8
Senba, Y.
Kishimoto, H.
Ohashi, H.
Yumoto, H.
Zeschke, T.
Siewert, F.
Goto, S.
Ishikawa, T.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3): : 237 - 240

← 1 2 3 4 5 →