Strain gauge using Si-based optical microring resonator

被引：12
|
作者：
Lei, Longhai [1 ,2 ]
Tang, Jun [1 ,2 ]
Zhang, Tianen [1 ,2 ]
Guo, Hao [1 ,2 ]
Li, Yanna [1 ,2 ]
Xie, Chengfeng [1 ,2 ]
Shang, Chenglong [1 ,2 ]
Bi, Yu [1 ,2 ]
Zhang, Wendong [1 ,2 ]
Xue, Chenyang [1 ,2 ]
Liu, Jun [1 ,2 ]
机构：
[1] North Univ China, Key Lab Instrumentat Sci & Dynam Measurement, Minist Educ, Taiyuan 030051, Peoples R China
[2] North Univ China, Key Lab Sci & Technol Elect Test & Measurement, Taiyuan 030051, Peoples R China
来源：
APPLIED OPTICS | 2014年 / 53卷 / 36期
基金：
美国国家科学基金会;
关键词：
SENSOR;
D O I：
10.1364/AO.53.008389
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents a strain gauge using the mechanical-optical coupling method. The Si-based optical microring resonator was employed as the sensing element, which was embedded on the microcantilevers. The experimental results show that applying external strain triggers a clear redshift of the output resonant spectrum of the structure. The sensitivity of 93.72 pm/MPa was achieved, which also was verified using theoretical simulations. This paper provides what we believe is a new method to develop micro-opto-electromechanical system (MOEMS) sensors. (C) 2014 Optical Society of America
引用
收藏
页码：8389 / 8394
页数：6
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