Si microring resonator optical switch based on optical phase shifter with ultrathin-InP/Si hybrid metal-oxide-semiconductor capacitor

被引：11
|
作者：
Ohno, Shuhei [1 ]
Li, Qiang [1 ]
Sekine, Naoki [1 ]
Tang, Hanzhi [1 ]
Monfray, Stephane [2 ]
Boeuf, Frederic [2 ]
Toprasertpong, Kasidit [1 ]
Takagi, Shinichi [1 ]
Takenaka, Mitsuru [1 ]
机构：
[1] Univ Tokyo, Dept Elect Engn & Informat Syst, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan
[2] STMicroelectronics, Technol & Design Platform, Crolles, France
来源：
OPTICS EXPRESS | 2021年 / 29卷 / 12期
关键词：
Energy efficiency;
D O I：
10.1364/OE.424963
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We propose a microring resonator (MRR) optical switch based on III-V/Si hybrid metal-oxide-semiconductor (MOS) optical phase shifter with an ultrathin InP membrane. By reducing the thickness of the InP membrane, we can reduce the insertion loss of the phase shifter, resulting in a high-quality-factor (Q-factor) MRR switch. By optimizing the device structure using numerical analysis, we successfully demonstrated a proof-of-concept MRR optical switch. The optical switch exhibits 0.3 pW power consumption for switching, applicable to power-efficient, thermal-crosstalk-free, Si programmable photonic integrated circuits (PICs) based on wavelength division multiplexing (WDM). (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码：18502 / 18511
页数：10
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