Si microring resonator optical switch based on optical phase shifter with ultrathin-InP/Si hybrid metal-oxide-semiconductor capacitor

被引：11

作者：

Ohno, Shuhei ^{[1
]}

Li, Qiang ^{[1
]}

Sekine, Naoki ^{[1
]}

Tang, Hanzhi ^{[1
]}

Monfray, Stephane ^{[2
]}

Boeuf, Frederic ^{[2
]}

Toprasertpong, Kasidit ^{[1
]}

Takagi, Shinichi ^{[1
]}

Takenaka, Mitsuru ^{[1
]}

机构：

[1] Univ Tokyo, Dept Elect Engn & Informat Syst, Bunkyo Ku, 7-3-1 Hongo, Tokyo 1138656, Japan

[2] STMicroelectronics, Technol & Design Platform, Crolles, France

来源：

OPTICS EXPRESS | 2021年 / 29卷 / 12期

关键词：

Energy efficiency;

D O I：

10.1364/OE.424963

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a microring resonator (MRR) optical switch based on III-V/Si hybrid metal-oxide-semiconductor (MOS) optical phase shifter with an ultrathin InP membrane. By reducing the thickness of the InP membrane, we can reduce the insertion loss of the phase shifter, resulting in a high-quality-factor (Q-factor) MRR switch. By optimizing the device structure using numerical analysis, we successfully demonstrated a proof-of-concept MRR optical switch. The optical switch exhibits 0.3 pW power consumption for switching, applicable to power-efficient, thermal-crosstalk-free, Si programmable photonic integrated circuits (PICs) based on wavelength division multiplexing (WDM). (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：18502 / 18511

页数：10

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