Circuit Modeling of a MEMS Varactor Including Dielectric Charging Dynamics

被引：2
|
作者：
Giounanlis, P. [1 ]
Andrade-Miceli, D. [1 ]
Gorreta, S. [2 ]
Pons-Nin, J. [2 ]
Dominguez-Pumar, M. [2 ]
Blokhina, E. [1 ]
机构：
[1] Univ Coll Dublin, Sch Elect Elect & Commun Engn, Dublin, Ireland
[2] Tech Univ Catalonia, Micro & Nano Technol Grp, Elect Engn Dept, Barcelona, Spain
来源：
27TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP (MME 2016) | 2016年 / 757卷
关键词：
D O I：
10.1088/1742-6596/757/1/012012
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.
引用
收藏
页数：6
相关论文
共 50 条
  • [41] Study of Residual Charging in Dielectric Less Capacitive MEMS Switches
    Mardivirin, D.
    Bouyge, D.
    Crunteanu, A.
    Pothier, A.
    Blondy, P.
    2008 IEEE MTT-S International Microwave Symposium Digest, Vols 1-4, 2008, : 33 - 36
  • [42] A Compact Model For Dielectric Charging in RF MEMS Capacitive Switches
    Sumant, Prasad S.
    Aluru, Narayana R.
    Cangellaris, Andreas C.
    INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2009, 19 (02) : 197 - 203
  • [43] Influence of beam geometry on the dielectric charging of RF MEMS switches
    Solazzi, Francesco
    Resta, Giuseppe
    Mulloni, Viviana
    Margesin, Benno
    Farinelli, Paola
    2011 6TH EUROPEAN MICROWAVE INTEGRATED CIRCUIT CONFERENCE, 2011, : 398 - 401
  • [44] Dielectric charging effects in floating electrode MEMS capacitive switches
    Michalas, L.
    Koutsoureli, M.
    Papandreou, E.
    Giacomozzi, F.
    Papaioannou, G.
    MICROELECTRONICS RELIABILITY, 2015, 55 (9-10) : 1891 - 1895
  • [45] Charging of radiation induced defects in RF MEMS dielectric films
    Exarchos, M.
    Papandreou, E.
    Pons, P.
    Lamhamdi, M.
    Papaioannou, G. J.
    Plana, R.
    MICROELECTRONICS RELIABILITY, 2006, 46 (9-11) : 1695 - 1699
  • [46] A Physics-Based Predictive Modeling Framework for Dielectric Charging and Creep in RF MEMS Capacitive Switches and Varactors
    Jain, Ankit
    Palit, Sambit
    Alam, Muhammad Ashraful
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (02) : 420 - 430
  • [47] Circuit Modeling of RF capacitive MEMS switch
    Buccella, C
    Feliziani, M
    Manzi, G
    ISIE 2005: PROCEEDINGS OF THE IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS 2005, VOLS 1- 4, 2005, : 1117 - 1121
  • [48] Probing contactless injection dielectric charging in RF MEMS capacitive switches
    Michalas, L.
    Koutsoureli, M.
    Papaioannou, G.
    ELECTRONICS LETTERS, 2014, 50 (10) : 766 - U153
  • [49] Effect of Surface Conduction on Dielectric Charging in RF MEMS Capacitive Switches
    Peng, Zhen
    Molinero, David
    Palego, Cristiano
    Hwang, James C. M.
    Moody, Cody
    Malczewski, Andrew
    Pillans, Brandon W.
    2010 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (MTT), 2010, : 1250 - 1253
  • [50] Effects of dielectric charging on MEMS-based grating light modulator
    Jie Zhang
    Ji Yong Sun
    Zhi Hai Zhang
    Yong Zhu
    Microsystem Technologies, 2009, 15 : 745 - 751
12345