Circuit Modeling of a MEMS Varactor Including Dielectric Charging Dynamics

被引：2

作者：

Giounanlis, P. ^{[1
]}

Andrade-Miceli, D. ^{[1
]}

Gorreta, S. ^{[2
]}

Pons-Nin, J. ^{[2
]}

Dominguez-Pumar, M. ^{[2
]}

Blokhina, E. ^{[1
]}

机构：

[1] Univ Coll Dublin, Sch Elect Elect & Commun Engn, Dublin, Ireland

[2] Tech Univ Catalonia, Micro & Nano Technol Grp, Elect Engn Dept, Barcelona, Spain

来源：

27TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP (MME 2016) | 2016年 / 757卷

关键词：

D O I：

10.1088/1742-6596/757/1/012012

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.

引用

页数：6

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