Circuit Modeling of a MEMS Varactor Including Dielectric Charging Dynamics

被引：2
|
作者：
Giounanlis, P. [1 ]
Andrade-Miceli, D. [1 ]
Gorreta, S. [2 ]
Pons-Nin, J. [2 ]
Dominguez-Pumar, M. [2 ]
Blokhina, E. [1 ]
机构：
[1] Univ Coll Dublin, Sch Elect Elect & Commun Engn, Dublin, Ireland
[2] Tech Univ Catalonia, Micro & Nano Technol Grp, Elect Engn Dept, Barcelona, Spain
来源：
27TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP (MME 2016) | 2016年 / 757卷
关键词：
D O I：
10.1088/1742-6596/757/1/012012
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Electrical models for MEMS varactors including the effect of dielectric charging dynamics are not available in commercial circuit simulators. In this paper a circuit model using lumped ideal elements available in the Cadence libraries and a basic Verilog-A model, has been implemented. The model has been used to simulate the dielectric charging in function of time and its effects over the MEMS capacitance value.
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页数：6
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