Design of production chemical vapor deposition equipment

被引:1
|
作者
Lieberman, V
机构
[1] Richter Precision Incorporated, East Petersburg, PA 17520
关键词
D O I
10.1016/0263-4368(96)83429-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The increased use of CVD hardcoatings for tungsten carbide inserts, and other components, has necessitated design of reliable, repeatable coating systems. Design of a CVD system requires the knowledge of a number of factors. These include the type of coatings to be deposited, the style and type of components to be coated, and the uniformity and quality of coating required. Systems must take into account the environment in which they will be housed, production requirements, quality of reactants, and environmental considerations. Fully automatic equipment that performs complex coating processes without operator intervention is used to ensure repeatable and reliable processing.
引用
收藏
页码:161 / 165
页数:5
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