Sensitivity coefficients of Pirani gauge for various atoms and molecules

被引：10

作者：

Kusakabe, T ^{[1
]}

Horiuchi, T

Nakai, Y

Tawara, H

机构：

[1] Kinki Univ, Fac Sci & Technol, Dept Nucl Engn, Higashiosaka, Osaka 577, Japan

[2] NEC Corp Ltd, Device Dev Labs, Sagamihara, Kanagawa 229, Japan

[3] Kinki Univ, Atom Energy Res Inst, Higashiosaka, Osaka 577, Japan

[4] Natl Inst Fus Sci, Chikusa Ku, Nagoya, Aichi 46401, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 01期

关键词：

Pirani gauge; sensitivity coefficient; constant voltage mode; reduced thermal conductivity; accommodation coefficient;

D O I：

10.1143/JJAP.37.369

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The sensitivity coefficients of a Pirani gauge in a constant voltage with bridge imbalance monitoring have been determined for various atoms and molecules. Except for light particles such as He atoms, H-2 and D-2 molecules, the observed coefficients show a strong correlation with the reduced thermal conductivities of free gas particles.

引用

页码：369 / 370

页数：2

共 50 条

[31] GENERAL ANALYSIS OF VARIOUS METHODS OF ATOMS IN MOLECULES
ARAI, T
REVIEWS OF MODERN PHYSICS, 1960, 32 (02) : 370 - 400
[32] Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime
Zhang, Guohe
Lai, Junhua
Kong, Yanmei
Jiao, Binbin
Yun, Shichang
Ye, Yuxin
AIP ADVANCES, 2018, 8 (05)
[33] A Pirani gauge in a high-intensity proton accelerator
Ogiwara, N. (ogiwara.norio@jaea.go.jp), 2012, Elsevier Ltd (86)
[34] A SIMPLE METHOD OF LEAK FINDING USING A PIRANI GAUGE
BLOOMER, RN
HAINE, ME
JOURNAL OF SCIENTIFIC INSTRUMENTS, 1953, 30 (10): : 385 - 386
[35] A PIRANI GAUGE FOR USE AT PRESSURES UP TO 15 MM
RITTNER, ES
REVIEW OF SCIENTIFIC INSTRUMENTS, 1946, 17 (03): : 113 - 114
[36] A Pirani gauge in a high-intensity proton accelerator
Ogiwara, Norio
Hikichi, Yusuke
Kuroiwa, Masahide
VACUUM, 2012, 86 (07) : 908 - 912
[37] Single carbon nanotube pirani gauge by local synthesis
Kawano, T.
Suter, M.
Cho, C. Y.
Chiamori, H.
Lin, L.
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
[38] STICKING COEFFICIENTS FOR ATOMS AND MOLECULES AT THE SURFACES OF INTERSTELLAR DUST GRAINS
LEITCHDEVLIN, MA
WILLIAMS, DA
MONTHLY NOTICES OF THE ROYAL ASTRONOMICAL SOCIETY, 1985, 213 (02) : 295 - 306
[39] DIFFUSION AND VOLUME LOSS COEFFICIENTS OF HELIUM METASTABLE ATOMS AND MOLECULES
PHELPS, AV
PHYSICAL REVIEW, 1955, 98 (02): : 558 - 558
[40] A MEMS Pirani Vacuum Gauge Based on Porous Silicon
Lin, Yuzhe
Zhang, Zichao
Tao, Jifang
Wen, Lianggong
MICROMACHINES, 2025, 16 (03)

← 1 2 3 4 5 →