Sensitivity coefficients of Pirani gauge for various atoms and molecules

被引:10
|
作者
Kusakabe, T [1 ]
Horiuchi, T
Nakai, Y
Tawara, H
机构
[1] Kinki Univ, Fac Sci & Technol, Dept Nucl Engn, Higashiosaka, Osaka 577, Japan
[2] NEC Corp Ltd, Device Dev Labs, Sagamihara, Kanagawa 229, Japan
[3] Kinki Univ, Atom Energy Res Inst, Higashiosaka, Osaka 577, Japan
[4] Natl Inst Fus Sci, Chikusa Ku, Nagoya, Aichi 46401, Japan
关键词
Pirani gauge; sensitivity coefficient; constant voltage mode; reduced thermal conductivity; accommodation coefficient;
D O I
10.1143/JJAP.37.369
中图分类号
O59 [应用物理学];
学科分类号
摘要
The sensitivity coefficients of a Pirani gauge in a constant voltage with bridge imbalance monitoring have been determined for various atoms and molecules. Except for light particles such as He atoms, H-2 and D-2 molecules, the observed coefficients show a strong correlation with the reduced thermal conductivities of free gas particles.
引用
收藏
页码:369 / 370
页数:2
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