Sensitivity coefficients of Pirani gauge for various atoms and molecules

被引:10
|
作者
Kusakabe, T [1 ]
Horiuchi, T
Nakai, Y
Tawara, H
机构
[1] Kinki Univ, Fac Sci & Technol, Dept Nucl Engn, Higashiosaka, Osaka 577, Japan
[2] NEC Corp Ltd, Device Dev Labs, Sagamihara, Kanagawa 229, Japan
[3] Kinki Univ, Atom Energy Res Inst, Higashiosaka, Osaka 577, Japan
[4] Natl Inst Fus Sci, Chikusa Ku, Nagoya, Aichi 46401, Japan
关键词
Pirani gauge; sensitivity coefficient; constant voltage mode; reduced thermal conductivity; accommodation coefficient;
D O I
10.1143/JJAP.37.369
中图分类号
O59 [应用物理学];
学科分类号
摘要
The sensitivity coefficients of a Pirani gauge in a constant voltage with bridge imbalance monitoring have been determined for various atoms and molecules. Except for light particles such as He atoms, H-2 and D-2 molecules, the observed coefficients show a strong correlation with the reduced thermal conductivities of free gas particles.
引用
收藏
页码:369 / 370
页数:2
相关论文
共 50 条
  • [1] Sensitivity coefficients of Pirani gauge for various atoms and molecules
    Kusakabe, Toshio
    Horiuchi, Tadahiko
    Nakai, Yohta
    Tawara, Hiroyuki
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (01): : 369 - 370
  • [2] THE PIRANI GAUGE
    GLOCKLER, G
    HORST, HV
    SCIENCE, 1952, 116 (3014) : 364 - 367
  • [3] Enhanced sensitivity of the Pirani vacuum gauge by the AC driving method
    Seong, D.J.
    Shin, Y.H.
    Chung, K.W.
    Kim, D.H.
    Shin, J.S.
    Yun, Y.J.
    Key Engineering Materials, 2005, 277-279 (0I) : 990 - 994
  • [4] Enhanced sensitivity of the Pirani vacuum gauge by the AC driving method
    Seong, DJ
    Shin, YH
    Chung, KH
    Kim, DH
    Shin, JS
    Yun, YJ
    ON THE CONVERGENCE OF BIO-INFORMATION-, ENVIRONMENTAL-, ENERGY-, SPACE- AND NANO-TECHNOLOGIES, PTS 1 AND 2, 2005, 277-279 : 990 - 994
  • [5] An improved Pirani gauge
    Tanner, HG
    JOURNAL OF PHYSICAL CHEMISTRY, 1930, 34 (05): : 1113 - 1115
  • [6] USE OF AN IONIZATION GAUGE AS A PIRANI GAUGE
    MORECROF.DW
    VACUUM, 1965, 15 (04) : 191 - &
  • [7] A PIRANI GAUGE CIRCUIT
    LITTING, CNW
    JOURNAL OF SCIENTIFIC INSTRUMENTS, 1955, 32 (03): : 91 - 92
  • [8] An automatic Pirani vacuum gauge
    Scott, EJ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1939, 10 (11): : 349 - 350
  • [9] A modified Pirani vacuum gauge
    De Vries, T
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA AND REVIEW OF SCIENTIFIC INSTRUMENTS, 1929, 18 (04): : 333 - 335
  • [10] A FEEDBACK CONTROLLED PIRANI GAUGE
    LECK, JH
    JOURNAL OF SCIENTIFIC INSTRUMENTS, 1958, 35 (03): : 107 - 108