Microlens reflector for out-of-plane optical coupling of a waveguide to a buried silicon photodiode

被引：5
|
作者：
Nathan, M [1 ]
机构：
[1] Tel Aviv Univ, Dept Phys Elect, Sch Elect Engn, IL-69978 Tel Aviv, Israel
来源：
APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 14期
关键词：
D O I：
10.1063/1.1803617
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A photoresist microlens is shown to be an extremely efficient reflective element for out-of-plane coupling of light from a negative epoxy-based photoresist (SU8) optical waveguide into a buried silicon pn photodetector. Experimentally determined coupling efficiencies are given for integrated waveguide/photodetector and waveguide/microlens/photodetector structures. The highest measured coupling efficiency in a structure with a 40 mum diameter, 13 mum high microlens is about 74%, versus an average of about 11% in structures without a microlens. The measured microlens-mediated coupling efficiency is in satisfactory agreement with a simple ray tracing simulation that provides a calculated value of 77.5% for the coupling efficiency. (C) 2004 American Institute of Physics.
引用
收藏
页码：2688 / 2690
页数：3
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