Tilting out-of-plane platform for optical applications

被引:0
|
作者
Overstolz, T [1 ]
Clerc, PA [1 ]
Gale, MT [1 ]
Herzig, HP [1 ]
Niederer, G [1 ]
Noell, W [1 ]
Söchtig, J [1 ]
Thiele, H [1 ]
de Rooij, NF [1 ]
机构
[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:81 / 82
页数:2
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