Tilting out-of-plane platform for optical applications

被引：0

作者：

Overstolz, T ^{[1
]}

Clerc, PA ^{[1
]}

Gale, MT ^{[1
]}

Herzig, HP ^{[1
]}

Niederer, G ^{[1
]}

Noell, W ^{[1
]}

Söchtig, J ^{[1
]}

Thiele, H ^{[1
]}

de Rooij, NF ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

来源：

2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：81 / 82

页数：2

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