Tilting out-of-plane platform for optical applications

被引：0
|
作者：
Overstolz, T [1 ]
Clerc, PA [1 ]
Gale, MT [1 ]
Herzig, HP [1 ]
Niederer, G [1 ]
Noell, W [1 ]
Söchtig, J [1 ]
Thiele, H [1 ]
de Rooij, NF [1 ]
机构：
[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland
来源：
2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：81 / 82
页数：2
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