Low-temperature synthesis of multiwalled carbon nanotubes by graphite antenna CVD in a hydrogen-free atmosphere

被引:10
|
作者
Yokoyama, Daisuke [1 ]
Iwasaki, Takayuki [1 ]
Ishimaru, Kentaro [1 ]
Sato, Shintaro [2 ]
Nihei, Mizuhisa [2 ]
Awano, Yuji [2 ]
Kawarada, Hiroshi [1 ]
机构
[1] Waseda Univ, Sch Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan
[2] Semicond Leading Edge Technol Inc, MIRAI Selete, Kanagawa 2430197, Japan
关键词
CHEMICAL-VAPOR-DEPOSITION; HIGH-YIELD GROWTH;
D O I
10.1016/j.carbon.2009.10.035
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Multiwalled carbon nanotubes (MWCNTs) were synthesized at 390 degrees C in a hydrogen-free atmosphere by graphite antenna chemical vapor deposition, which provides carbon radicals by the etching of the antenna itself in a He- or Ar-based noble gas plasma. An increase in the number of defects in the graphite layers of the CNTs was observed with increasing hydrogen partial pressure. The results of X-ray photoelectron spectroscopy analysis suggested that these defects were caused by the transformation from an sp(2) to an sp(3) structure in the graphite layers of CNTs due to hydrogen radicals. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码:825 / 831
页数:7
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