Thickness mapping of thin dielectrics with emission microscopy and conductive atomic force microscopy for assessment of dielectrics reliability

被引：0
|
作者：
Ebersberger, B [1 ]
Benzinger, G [1 ]
机构：
[1] SIEMENS AG,SEMICOND DIV,D-81739 MUNICH,GERMANY
来源：
1996 IEEE INTERNATIONAL RELIABILITY PHYSICS PROCEEDINGS, 34TH ANNUAL | 1996年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：126 / 130
页数：3
相关论文
共 50 条
  • [41] Analysis of Thickness Dependence of Nanoscaled Thin Film and Substrate by Ultrasonic Atomic Force Microscopy
    Kwak, Dong-Ryul
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2021, 22 (02) : 345 - 354
  • [42] Nanoscale Characterization Of Ultra-Thin Dielectrics Using Scanning Capacitance Microscopy
    Ligor, O.
    Gautier, B.
    Descamps, A.
    Albertini, D.
    Militaru, L.
    Baboux, N.
    FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009, 2009, 1173 : 193 - 197
  • [43] Subsurface damage assessment with atomic force microscopy
    Carr, JW
    Fearon, E
    Summers, LJ
    Hutcheon, ID
    PRECISION ENGINEERING, NANOTECHNOLOGY, VOL. 2, 1999, : 451 - 454
  • [44] Conductive-mode atomic force microscopy study of amorphous silicon nitride thin films
    Aya, Y
    Ando, A
    Yamasaki, S
    Wakisaka, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2003, 42 (11A): : L1321 - L1323
  • [45] Detecting band profiles of devices with conductive atomic force microscopy
    Li, Ranran
    Taniguchi, Takashi
    Watanabe, Kenji
    Xue, Jiamin
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2020, 91 (07):
  • [46] Leakage currents at crystallites in ZrAlxOy thin films measured by conductive atomic-force microscopy
    Bierwagen, O.
    Geelhaar, L.
    Gay, X.
    Piesins, M.
    Riechert, H.
    Jobst, B.
    Rucki, A.
    APPLIED PHYSICS LETTERS, 2007, 90 (23)
  • [47] Conductive atomic force microscopy of InAs/GaAs quantum rings
    Mlakar, Tomaz
    Biasiol, Giorgio
    Heun, Stefan
    Sorba, Lucia
    Vijaykumar, T.
    Kulkarni, G. U.
    Spreafico, Vittorio
    Prato, Stefano
    APPLIED PHYSICS LETTERS, 2008, 92 (19)
  • [48] Conductive Atomic Force Microscopy failure analysis for SOI devices
    Soon-Huat, Lim
    Zheng Xinhua
    Chea-Wei, Teo
    Narang, Vinod
    Hock, Teo Beng
    Chin, J. M.
    IPFA 2008: PROCEEDINGS OF THE 15TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS, 2008, : 96 - 99
  • [49] Electrical conductivities of nanosheets studied by conductive atomic force microscopy
    Yilmaz, Neval
    Ida, Shintaro
    Matsumoto, Yasumichi
    MATERIALS CHEMISTRY AND PHYSICS, 2009, 116 (01) : 62 - 66
  • [50] Hydrogenated Nanocrystalline Silicon Investigated by Conductive Atomic Force Microscopy
    Cavallini, A.
    Cavalcoli, D.
    Rossi, M.
    Tomasi, A.
    Pichaud, B.
    Texier, M.
    Le Donne, A.
    Pizzini, S.
    Chrastina, D.
    Isella, G.
    MICROSCOPY OF SEMICONDUCTING MATERIALS 2007, 2008, 120 : 301 - +
12345