A method for computing ion energy distributions for multifrequency capacitive discharges

被引：46
|
作者：
Wu, Alan C. F. [1 ]
Lieberman, M. A.
Verboncoeur, J. P.
机构：
[1] Univ Calif Berkeley, Dept Nucl Engn, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Elect Engn, Berkeley, CA 94720 USA
来源：
JOURNAL OF APPLIED PHYSICS | 2007年 / 101卷 / 05期
关键词：
D O I：
10.1063/1.2435975
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The ion energy distribution (IED) at a surface is an important parameter for processing in multiple radio frequency driven capacitive discharges. An analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with particle-in-cell simulations over a wide range of single, dual, and triple frequency driven capacitive discharge excitations. (c) 2007 American Institute of Physics.
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页数：3
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