A method for computing ion energy distributions for multifrequency capacitive discharges

被引：46
|
作者：
Wu, Alan C. F. [1 ]
Lieberman, M. A.
Verboncoeur, J. P.
机构：
[1] Univ Calif Berkeley, Dept Nucl Engn, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Elect Engn, Berkeley, CA 94720 USA
来源：
JOURNAL OF APPLIED PHYSICS | 2007年 / 101卷 / 05期
关键词：
D O I：
10.1063/1.2435975
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The ion energy distribution (IED) at a surface is an important parameter for processing in multiple radio frequency driven capacitive discharges. An analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with particle-in-cell simulations over a wide range of single, dual, and triple frequency driven capacitive discharge excitations. (c) 2007 American Institute of Physics.
引用
收藏
页数：3
相关论文
共 50 条
  • [21] ELECTRON ENERGY DISTRIBUTIONS IN VARIOUS DISCHARGES
    BARNES, BT
    JOURNAL OF APPLIED PHYSICS, 1966, 37 (07) : 2679 - &
  • [22] Effect of electrode material on measured ion energy distributions in radio-frequency discharges
    1600, American Inst of Physics, Woodbury, NY, USA (67):
  • [23] A Comparison of Ion Energy Distributions Calculated by Various Methods in Capacitively Coupled Plasma Discharges
    Kwon, Deuk-Chul
    Yoon, Nam-Sik
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 55 (05) : 1849 - 1854
  • [24] Ion energy distributions in reactive arc evaporation discharges used for deposition of TiN films
    Ivanov, I
    Ljungcrantz, H
    Hakansson, G
    Petrov, I
    Sundgren, JE
    SURFACE & COATINGS TECHNOLOGY, 1997, 92 (1-2): : 150 - 156
  • [25] Ion energy distributions in reactive arc evaporation discharges used for deposition of TiN films
    Ivanov, I.
    Ljungcrantz, H.
    Hakansson, G.
    Petrov, I.
    Sundgren, J.-E.
    Surface and Coatings Technology, 1997, 92 (1-2): : 150 - 156
  • [26] Axial Evolution of the Electron Energy Distribution in Capacitive Discharges
    Pavlova, Rositsa
    Gilev, Bogdan
    Tarnev, Khristo
    PROCEEDINGS OF THE 44TH INTERNATIONAL CONFERENCE "APPLICATIONS OF MATHEMATICS IN ENGINEERING AND ECONOMICS", 2018, 2048
  • [27] ENERGY DISTRIBUTIONS OF ELECTRONS IN ARGON TOWNSEND DISCHARGES
    BURCH, DS
    LOSEE, J
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1971, 16 (02): : 210 - &
  • [28] ELECTRON ENERGY DISTRIBUTIONS IN TOWNSEND DISCHARGES IN HYDROGEN
    KENNY, TE
    CRAGGS, JD
    JOURNAL OF PHYSICS PART B ATOMIC AND MOLECULAR PHYSICS, 1970, 3 (02): : 251 - &
  • [29] CALCULATION OF ION ENERGY-DISTRIBUTIONS IN LOW-FREQUENCY RF GLOW-DISCHARGES
    JAMES, AS
    MATTHEWS, A
    SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3): : 86 - 90
  • [30] Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode
    Corbella, C.
    Rubio-Roy, M.
    Bertran, E.
    Portal, S.
    Pascual, E.
    Polo, M. C.
    Andujar, J. L.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (01):
12345