Stability of single and tandem junction a-Si:H solar cells grown using the ECR process

We report on the fabrication and stability tests of single junction a-Si:H, and tandem junction a-Si:Wa-Si:H solar cells using the ECR process under high hydrogen dilution (H-ECR process). We show that devices with high fill factors can be made using the H-ECR process. We also report on the stability studies of the solar cells under 1 and 2-sun illumination conditions. The solar cells show very little degradation even after 500 hours of illumination under 2 x sunlight illumination.