Correlation between defects and electrical conduction in surface conductive layer of CVD-diamond films

Correlation between defects and electrical conduction in surface conductive layers of CVD diamond films has been studied using electron spin resonance (ESR) and two points probe technique methods, The ESR analysis revealed the presence of P-ac-center with spin density of 10(20) spins/cm(3). The P-ac-center is composed from two ESR signals : ESR signal from carbon dangling bond with carbon atom neighbors and ESR signal from carbon dangling bond associated with nearest neighbor hole ( hole associated P-ac-center). The hole associated P-ac-center is an electrically active defect.