Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass

被引：0
|
作者：
Cheng, Ya [1 ]
Liao, Yang [1 ]
Sugioka, Koji [2 ]
机构：
[1] Chinese Acad Sci, State Key Lab High Field Laser Phys, Shanghai Inst Opt & Fine Mech, POB 800-211, Shanghai 201800, Peoples R China
[2] RIKEN, Laser Technol Lab, Adv Sci Inst, Wako, Saitama 3510198, Japan
来源：
PROGRESS IN ULTRAFAST LASER MODIFICATIONS OF MATERIALS | 2013年 / 8卷
关键词：
D O I：
10.1051/matecconf/20130805002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of similar to 40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.
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页数：2
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