Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass

被引：0

作者：

Cheng, Ya ^{[1
]}

Liao, Yang ^{[1
]}

Sugioka, Koji ^{[2
]}

机构：

[1] Chinese Acad Sci, State Key Lab High Field Laser Phys, Shanghai Inst Opt & Fine Mech, POB 800-211, Shanghai 201800, Peoples R China

[2] RIKEN, Laser Technol Lab, Adv Sci Inst, Wako, Saitama 3510198, Japan

来源：

PROGRESS IN ULTRAFAST LASER MODIFICATIONS OF MATERIALS | 2013年 / 8卷

关键词：

D O I：

10.1051/matecconf/20130805002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of similar to 40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.

引用

页数：2

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