Communication-Copper Grain Growth and Texture Formation in Copper-Titanium Thin Films

被引：0
|
作者：
Faheem, Mohammad [1 ]
Giridharan, Rudy Ratnadurai [1 ]
Dai, Xintuo [1 ]
Vaid, Alok [1 ]
机构：
[1] GLOBALFOUNDRIES Inc, Malta, NY 12020 USA
来源：
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2017年 / 6卷 / 01期
关键词：
ALLOYS;
D O I：
10.1149/2.0201701jss
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Six samples of titaniumwith 50 nm copper on top were deposited on Si substrates and annealed at 400 degrees C. Phase analysis demonstrates the presence of CuTi, Cu4Ti and Cu3Ti phases which appear as a result of diffusion. The comparison between samples showed a slight change in Cu (111) crystallite size. However, CuTi crystallite size increased with increase in Ti layer thickness. Stress showed an opposite trend. Significant texture improvement was noted for Cu (111) caused by diffusion phases. Larger grains, lower stresses, and highly textured materials can be attractive candidates to resist electromigration in semiconductor devices. (C) 2016 The Electrochemical Society. All rights reserved.
引用
收藏
页码：P49 / P51
页数：3
相关论文
共 50 条
  • [21] The effect of target purities on grain growth in sputtered copper thin films
    Moriyama, M
    Morita, T
    Tsukimoto, S
    Shimada, M
    Murakami, M
    MATERIALS TRANSACTIONS, 2005, 46 (05) : 1036 - 1041
  • [22] Active copper species in supported copper-titanium oxide catalysts.
    Simakov, AV
    Komova, OV
    Rogov, VA
    Kochubei, DI
    Odegova, GV
    Kriventsov, VV
    Paukshtis, EA
    Ushakov, VA
    Sazonova, NN
    Nikoro, TA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 222 : U344 - U344
  • [23] Age-hardening copper-titanium alloys
    Hensel, FR
    Larsen, EI
    TRANSACTIONS OF THE AMERICAN INSTITUTE OF MINING AND METALLURGICAL ENGINEERS, 1932, 99 : 55 - 64
  • [24] THE CELLULAR REACTION IN DILUTE COPPER-TITANIUM ALLOYS
    ECOB, RC
    BEE, JV
    RALPH, B
    METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1980, 11 (08): : 1407 - 1414
  • [25] THERMODYNAMIC INVESTIGATIONS OF LIQUID COPPER-TITANIUM ALLOYS
    SOMMER, F
    KLAPPERT, KH
    ARPSHOFEN, I
    PREDEL, B
    ZEITSCHRIFT FUR METALLKUNDE, 1982, 73 (09): : 581 - 584
  • [26] DIRECT OBSERVATIONS ON PRECIPITATION IN COPPER-TITANIUM ALLOYS
    SATO, K
    TRANSACTIONS OF THE JAPAN INSTITUTE OF METALS, 1966, 7 (04): : 267 - &
  • [27] INFLUENCE OF TEMPERATURE ON AGING OF COPPER-TITANIUM ALLOYS
    DUTKIEWICZ, J
    BULLETIN DE L ACADEMIE POLONAISE DES SCIENCES-SERIE DES SCIENCES TECHNIQUES, 1974, 22 (04): : 323 - +
  • [28] A metal coating of copper-titanium as potential biomaterials
    Pan, Changjiang
    Liu, Hengquan
    Liu, Tao
    Zhou, Shijie
    INTEGRATED FERROELECTRICS, 2017, 179 (01) : 56 - 62
  • [29] Grain growth and texture evolution in thin films
    Massachusetts Inst of Technology, Cambridge, United States
    Mater Sci Forum, pt 1 (83-98):
  • [30] Grain growth and texture evolution in thin films
    Thompson, CV
    Carel, R
    GRAIN GROWTH IN POLYCRYSTALLINE MATERIALS II, PTS 1 AND 2, 1996, 204- : 83 - 98
12345